【摘要】 热导率是反映材料热性能的重要参数，不管是用于散热还是绝热，对材料热导率的准确测试具有重要意义。本文综述一种适应性强、测试便捷、样品制备简单、测试设备成本低的热导率测试方法—3ω法，首先介绍了利用3ω法测试热导率的基本原理；然后给出不同样品测试结构下热传输数学模型的温升解析解，包括半无限大衬底、薄膜结构、多层结构和细线结构样品；介绍了各种改进的3ω法，包括对薄膜热导率各向异性的测试、可以减少无关因素影响的差分3ω法、通过热穿透深度等效的方式利用阻抗模型拟合热导率的方法，同时介绍了3ω测试技术在传感器上的应用；最后，指出3ω法测试过程中可能的误差来源，以及提升测试精度的方法。本文将有助于研究人员进行热导率测试的研究，对3ω法的设计与分析提供指导。更多还原

【Abstract】 Thermal conductivity is an important parameter reflecting the thermal properties ofmaterials, whether it is used for heat dissipation or insulation. It is of great significance to accuratelymeasure the thermal conductivity of materials. This paper reviews a thermal conductivity measuringmethod with strong adaptability, convenient testing, simple sample preparation, and low-cost—the 3ω method. Firstly, the basic principle of 3ω method was introduced. Then the analyticalsolutions for temperature of heat conduction mathematical models under different sample structuresare provided, including semi-infinite substrates, thin film systems, multi-layer structures, and finerod or filament-like sample. Various improved 3ω methods are introduced, including the anisotropyof thin film thermal conductivity, differential 3ω method that can reduce the influence of irrelevantfactors, and the method of fitting thermal conductivity using impedance models through thermalpenetration depth equivalence. At the same time, the application of 3ω in sensors are introduced.Finally, the possible errors in the experiment process and the methods to improve the accuracyare analyzed. This paper will help researchers to study the thermal conductivity measurement andprovide guidance for the design and analysis of 3ω method.更多还原